Photoresist composition

ABSTRACT

Photoresist compositions having a resin binder with an acid labile blocking group with an activation energy in excess of 20 Kcal/mol. for deblocking, a photoacid generator capable of generating a halogenated sulfonic acid upon photolysis and optionally, a base.

The present application is a continuation application of applicationSer. No. 10/457,282, filed on Jun. 9, 2003, which application is acontinuation-in-part of application Ser. No. 09/470,067, filed on Dec.22, 1999, now U.S. Pat. No. 6,645,698, which is a continuationapplication of application Ser. No. 08/921,985, filed on Aug. 28, 1997,now U.S. Pat. No. 6,037,107.

BACKGROUND OF THE INVENTION

The present invention is directed to photoresist compositions suitablefor DUV exposure. More particularly, the present invention is directedto a photoresist film where linewidth variation as a function of hightemperature post exposure bake is minimized.

Photoresists are photosensitive films for transfer of an image to asubstrate. These resists form negative or positive images. After coatinga photoresist coating composition onto a substrate, the coating isexposed through a patterned photomask to a source of activating energysuch as ultraviolet light to form a latent image in the coating. Thephotomask has areas both opaque and transparent to activating radiationthat define a desired image to be transferred to the underlyingsubstrate. A relief image is provided by development of the latent imagepattern in the resist coating.

The use of photoresists is generally described, for example, byDeForest, Photoresist Materials and Processes, McGraw Hill Book Company,New York (1975), and by Moreau, Semiconductor Lithography, Principals,Practices and Materials, Plenum Press, New York (1988).

Recent developments in photoresist imaging involve formulation ofphotoresists imaged by exposure of coatings to deep ultraviolet (DUV)radiation. As is known by those in the art, DUV refers to exposureradiation having a wavelength in the range of 350 nm or less, moretypically in the range of 300 nm or less and most often, 248 μm.Photoresists imaged by DUV exposure offer the advantage of providingpatterns of reduced feature size compared to photoresists imaged byexposure to radiation of longer wavelength.

“Chemically amplified” photoresist compositions have been developed thatare especially suitable for DUV imaging. Chemically amplifiedphotoresists may be negative or positive-acting and rely on manycrosslinking events (in the case of a negative-acting resist) ordeprotection reactions (in the case of a positive-acting resist), eachcatalyzed by photogenerated acid or base. In the case of the positivechemically amplified resist, certain cationic photoinitiators capable ofyielding a photogenerated acid have been used to induce cleavage ofcertain “blocking” groups pendant from a photoresist binder, or cleavageof certain groups that comprise a certain photoresist binder backbone.See, for example, U.S. Pat. Nos. 4,491,628; 4,810,613; 4,883,740;4,968,581; 5,075,199; 5,258,257; 5,362,600; and 5,558,971. Upon exposureof a photoresist coating and a post exposure bake, selected cleavage ofthe blocking group results in formation of a polar functional group,e.g., hydroxyl, carboxyl or imide. The generation of a polar functionalgroup provides differential solubility characteristics between exposedand unexposed areas of the resist coating.

The above patents illustrate a variety of blocking groups that may beutilized for positive working chemically amplified photoresists. Eachblocking group requires a given quantity of energy to effect deblocking.The required energy is known in the art as the activation energy. Ameans to determine activation energy is described by Wallraff et al.,Kinetics of Chemically Amplified Resists, Photopolymers Principles,Processes, and Materials, Tenth International Technical Conference, pp.11-17, Oct. 31-Nov. 2, 1994, Society of Plastic Engineers, Inc. and byWallraff et al., J. Vac. Sci Technol., 1995, 12 (6) 3857. Activationenergy is expressed in units of Kcal/mol. Blocking groups having greateractivation energy for deblocking require more severe conditions toeffect deblocking. Means for overcoming greater activation energyinclude use of a stronger photogenerated acid and/or higher baketemperatures.

Many different blocking groups are disclosed in the above identifiedpatents. For example, in U.S. Pat. No. 5,558,971, the blocking group isan acetal or ketal group of the formula “—OCR¹R²OR³” where R¹ and R² areindependently a hydrogen atom, a straight-chain, branched or cyclicalkyl group having 1-6 carbon atoms, a straight-chain or branchedhaloalkyl group having 1-6 carbon atoms, or a phenyl group, providedthat R¹ and R² are not hydrogen at the same time, or R¹ and R² maycombine to form a methylene chain having 2-5 carbon atoms, and R³ is astraight chain, branched or cyclic alkyl group having 1-10 carbon atoms,a straight-chain, branched or cyclic haloalkyl group having 1-6 carbonatoms, an acetyl group or an aralkyl group.

The acetal or ketal group as represented by the above formula isdeblocked at a relatively low activation energy, typically from 10 to 20Kcal/mol. To effect deblocking, a relatively weak photogenerated acidand/or a relatively low temperature post exposure bake or both may beused to effect the deblocking reaction. Though this is desirable forprocessing of the photoresist coating, a low activation energyformulation suffers certain disadvantages. For example, deblocking ofthe blocking group may randomly occur during storage of the photoresistin its container. A decreased number of blocking groups on the polymerbackbone may result in an unpredictable change in resist photospeed uponimaging.

To avoid storage instability, certain vendors of chemically amplifiedresists have used blocking groups that require a greater activationenergy. For example, in U.S. Pat. No. 5,362,600, the blocking groupconforms to the formula —CR⁴R⁵C(═O)OR⁶ where each of R⁴ and R⁵ isindependently selected from the hydrogen, an electron withdrawing groupsuch as halogen, lower alkyl having 1 to 10 carbon atoms, andsubstituted lower alkyl having 1 to 10 carbon atoms; and R⁶ is asubstituted or unsubstituted lower alkyl having from 1 to 10 carbonatoms, substituted or unsubstituted aryl having from 1 to 10 carbonatoms, and substituted or unsubstituted benzyl having 7 to 10 carbonatoms. The substitutents may be, for example, one or more of halogen,lower alkyl, lower alkoxy, aryl or benzyl. R⁴ and R⁵ desirably are eachhydrogen. If R⁴ and/or R⁵ are halogen or other electron-withdrawinggroup, upon acidic cleavage of the acetate group, a highly polar groupis formed providing enhanced solubility differential between exposed andunexposed regions of the photoresist coating. The difluoro group (i.e.,R⁴ and R⁵ are both fluoro) is especially suitable and provides extremelyhigh dissolution differential between exposed and unexposed regions withonly modest levels of substitution of hydroxy groups on the polymerbinder.

For the high energy blocking groups described above, an activationenergy of at least 20 Kcal/mole is required and typically, the requiredactivation energy is within the range of from 25 to 40 Kcal/mole. Toenable deblocking to occur, it is necessary to use one or both of aphotoacid generator capable of liberating a strong acid and/or a hightemperature post exposure bake, typically a temperature in excess of120° C. and preferably, a temperature of from 130° C. to 150° C. orhigher.

For reasons set forth above, those photoresists using blocking groupsrequiring high activation energy are generally subjected to one andoften two high temperature baking steps. In practice, it has been foundthat with high temperature baking, minor variations in the baketemperature, i.e., variations of +1° C., across the width of thephotoresist coating may lead to significant variation in linewidthacross the developed coating and that this variation increases withincreased bake temperature. This sensitivity is referred to in the artas PEB sensitivity which is defined as changes in linewidth at a fixedexposure dose on wafers that are post-exposure baked at increasingtemperatures. The measured linewidth on each wafer is plotted againstthe PEB temperature and the PEB sensitivity in nm/° C. is the slope ofthe line. PEB sensitivity may be as much as 5% per degree Celsius. It isknown that it is difficult to maintain a uniform temperature across thefull width of the resist coating—i.e., across the full width of a wafercoated with photoresist which may be 8 or more inches in diameter.

Linewidth variation is unacceptable for most commercial applications.Therefore, it is desirable to have chemically amplified photoresistcompositions capable of providing highly resolved fine line images,including images of submicron and sub half-micron dimension, which arePEB insensitive. It is particularly desirable to have such a chemicallyamplified photoresist where variation in linewidth as a function of postexposure bake temperature is reduced or eliminated.

SUMMARY OF THE INVENTION

The present invention provides a chemically amplified photoresistcomposition comprising a resin binder having acid labile blocking groupsrequiring an activation energy in excess of 20 Kcal/mole, a photoacidgenerator capable of generating a strong halogenated sulfonic acid uponphotolysis, and optionally a base additive. Surprisingly, it has beenfound that PEB (post-exposure baked) sensitivity as a consequence of ahigh temperature bake is substantially reduced when using thehalogenated sulfonic acid generator and further, the base additive alsocontributes to a reduction in the PEB sensitivity. Accordingly, thephotoresists of the invention provide photoresist coating compositioncapable of forming highly resolved relief images of submicron dimensionwith vertical or essentially vertical sidewalls, uniformly imaged acrossthe full width of a wafer over which the photoresist is coated,regardless of the temperature differential across the surface of theresist coating during the bake step.

A copolymer of the invention corresponds to the following formula:

wherein R¹¹ of units 1) is substituted or unsubstituted alkyl having 1to 10 carbon atoms. The polymer may comprise a mixture of different R¹¹groups, e.g., by using a variety of acrylate monomers during the polymersynthesis.

R¹ groups of units 2) each independently may be halogen, substituted orunsubstituted alkyl, substituted or unsubstituted alkoxy, substituted orunsubstituted alkenyl, substituted or unsubstituted alkynyl, substitutedor unsubstituted alkylthio, cyano, or nitro; and m is an integer of from0 (where the phenyl ring is fully hydrogen-substituted) to 5. Also, twoR¹ groups on adjacent carbons may be taken together to form (with ringcarbons to which they are attached) one, two or more fused aromatic oralicyclic rings having from 4 to 8 ring members per ring. As with units1), the polymer may comprise a mixture of different units 2) withdiffering R¹ groups or no R¹ groups (i.e. m=0) by using a variety ofsubstituted or unsubstituted vinylphenyl monomers during the polymersynthesis.

R² groups of units 3) each independently may be halogen, substituted orunsubstituted alkyl, substituted or unsubstituted alkoxy, substituted orunsubstituted alkenyl, substituted or unsubstituted sulfonyl,substituted or unsubstituted alkyl esters; and p is an integer of from 0(where the phenyl ring has a single hydroxy substitutent) to 4. Also,two R² groups on adjacent carbons may be taken together to form (withring carbons to which they are attached) one, two or more fused aromaticor alicyclic rings having from 4 to 8 ring members per ring. As withunits 1), the polymer may comprise a mixture of different units 3) withdiffering R² groups or no R² groups (i.e. p=0) by using a variety ofsubstituted or unsubstituted vinylphenyl monomers during the polymersynthesis. As shown in the formula above, the hydroxyl group of units 3)may be either at the ortho, meta or para positions throughout thecopolymer.

Each R³, R⁴ and R⁵ substitutents independently may be hydrogen orsubstituted or unsubstituted alkyl.

In the above formula, x, y and z are mole fractions or percents of units3), 2) and 1), respectively, in the copolymer. Variable x may be from 10to 90 percent; y may be from 1 to 75 percent; and z may be 1 to 75percent.

The photoacid generator used in the formulation of the invention is onethat yields a strong halogenated sulfonic acid upon photolysis,preferably one having a pK_(a) no greater than 0, and more preferably, apK_(a) of between −5.0 and −15.0. Preferred photoactive generators aresulfonate salts of compounds containing a strong halogen electronwithdrawing group such as the fluorine atom. Suitable bases optionallyused in combination with the acid generator are those preferably havinga pK_(a) of at least 9.0 and more preferably, a pK_(a) between 11.0 and15.0. Desirably, the strong base is a quaternary ammonium hydroxide.

One class of photoacid generators that may be used to practice theinvention have a formula:G-Q-SO₂—RX_(a)where R may be an alkyl having from 1 to 18 carbon atoms, X is a strongelectron withdrawing group, subscript “a” is a whole number, Q is oxygenor a chemical bond, and G is a substituted or unsubstituted alkylphenyl, a substituted phenyl, an imido, sulfone, sulfonium ion, oriodonium ion.

Another class of photoacid generators include a photoacid generatorhaving a formula:

where X, R and subscript “a” are defined as above and R¹³ is a straightchain, branched or cycle alkyl and Z₁ is a sulfonyl or carbonyl group.

The invention also provides methods for forming relief images using thephotoresists of the invention and articles of manufacture comprisingsubstrates such as a microelectronic wafer or a flat panel displaysubstrate coated with the photoresists invention. Other aspects of theinvention are disclosed herein.

DETAILED DESCRIPTION OF THE INVENTION

The photoresists of the invention comprise a resin binder, a photoacidgenerator that liberates a halogenated sulfonic acid upon photolysis andoptionally, a base. The photoresist is used in a process comprising thesteps of coating the same onto a substrate, imaging to DUV irradiationand post exposure baking (PEB) the resist coating at a temperature inexcess of 120° C. and preferably in excess of 130° C.

The resin binder component of the photoresist desirably contains phenolunits substituted with acid labile groups which may be pendant from theresin backbone. The resin is used in an amount sufficient to render anexposed coating of the resist developable such as with an aqueousalkaline solution. Exemplary phenolic resins containing acid labilegroups are disclosed in the above mentioned patents such as U.S. Pat.No. 4,491,628 to Ito as well as in U.S. Pat. No. 5,258,257 to Sinta etal, and U.S. Pat. No. 5,492,793 to Ito.

Typical resin binders comprise polymers such as novolak resins andpolyvinylphenol resins. A polymer suitable for purposes of the inventioncomprises units of a structure selected from the group consisting of

where unit (1) represents a phenolic unit and unit (2) represents acyclic alcohol unit; Z is an alkylene bridge having from 1 to 3 carbonatoms; A is a substitutent on the aromatic ring replacing hydrogen suchas lower alkyl having from 1 to 3 carbon atoms, halo such as fluoro,chloro or bromo, alkoxy having from 1 to 3 carbon atoms, hydroxyl,nitro, amino, etc.; B is a substitutent such as hydrogen, lower alkylhaving from 1 to 3 carbon atoms, halo such as fluoro, chloro or bromo,alkoxy having from 1 to 3 carbon atoms, hydroxyl, nitro, amino, etc.,provided that at least 3 of said B substitutents are hydrogen; subscript“a” is a number varying from 0 to 3; b is an integer varying from 6 and10; and x is the mole fraction of units (1) in the polymer. Thepercentage of cyclic alcohol units preferably is not so high as toprevent development of an exposed film in a polar developer. The polymertherefore should have a major portion of phenolic units and a minorportion of cyclic alcohol units, i.e., less than 50 mole percent ofcyclic alcohol units. However, it has been found that the transparencyof the photoresist composition increases with increasing concentrationof cyclic alcohol units and for this reason, in certain cases, it may bedesirable to employ a polymer having a major portion of cyclic alcoholunits and a minor portion of phenolic units. This can he achieved byusing suitable blocking groups which upon acid catalyzed hydrolysisprovide polar functional groups rendering exposed regions highly solublein polar developer solutions.

An additional suitable class of resins comprises a copolymer ofhydroxystyrene and an acrylate, methacrylate or a mixture of the two.The hydroxystyrene component provides base solubility to the resistcomposition. This component is suitably the para- or meta-isomer and canbe substituted with various substitutents that do not interfere withlithography such as halogen, methoxy or lower alkyl, e.g. methyl orethyl. α-Methyl-hydroxy-styrene monomer can also be incorporated intothe polymer. The ester group of the acrylate or the methacrylate is anacid labile group which inhibits the dissolution of the polymer inalkaline developer and provides acid sensitivity to the polymer.Polymers of this description may be represented by the followingstructural formula:

where x′ represents the mole fraction of the hydroxystyrene units and y′represents the mole fraction of the acrylate units, the hydroxyl groupon the hydroxystyrene may be present at either the ortho, meta or parapositions throughout the copolymer, and R⁷ is substituted orunsubstituted alkyl having 1 to 18 carbon atoms, more typically 1 to 8carbon atoms. Tert-butyl is a generally preferred R⁷ group. An R⁷ groupis desirably substituted by e.g. one or more halogen atoms (particularlyF, Cl or Br), C₁₋₈ alkoxy, C₂₋₈ alkenyl, etc. The units x′ and y′ may beregularly alternating in the copolymer, or may be randomly interspersedthrough the polymer. Preferably, x′ varies between 0.5 and 0.95 and y′varies between 0.05 and 0.5.

A particularly preferred copolymer of the invention corresponds to thefollowing formula:

wherein R¹¹ of units 1) is substituted or unsubstituted alkyl. Forexample, R¹¹ may have 1 to 10 carbon atoms, preferably 1 to 8 carbons,and more preferably 1 to 6 carbon atoms. Branched alkyls such astert-butyl are the most preferred R¹¹ groups. Also, the polymer maycomprise a mixture of different R¹¹ groups, e.g., by using a variety ofacrylate monomers during the polymer synthesis.

R¹ groups of units 2) each independently may be e.g. halogen(particularly F, Cl and Br), substituted or unsubstituted alkylpreferably having 1 to 8 carbons, substituted or unsubstituted alkoxypreferably having 1 to 8 carbon atoms, substituted or unsubstitutedalkenyl preferably having 2 to 8 carbon atoms, substituted orunsubstituted alkynyl preferably having 2 to 8 carbons, substituted orunsubstituted alkylthio preferably having 1 to 8 carbons, cyano, nitro,etc.; and m is an integer of from 0 (where the phenyl ring is fullyhydrogen-substituted) to 5, and preferably is 0, 1 or 2. Also, two R¹groups on adjacent carbons may be taken together to form (with ringcarbons to which they are attached) one, two or more fused aromatic oralicyclic rings having from 4 to 8 ring members per ring. For example,two R¹ groups can be taken together to form (together with the depictedphenyl) a naphthyl or acenaphthyl ring. As with units 1), the polymermay comprise a mixture of different units 2) with differing R¹ groups orno R¹ groups (i.e. m=0) by using a variety of substituted orunsubstituted vinylphenyl monomers during the polymer synthesis.

R² groups of units 3) each independently may be e.g. halogen(particularly F, Cl and Br), substituted or unsubstituted alkylpreferably having 1 to 8 carbons, substituted or unsubstituted alkoxypreferably having 1 to 8 carbon atoms, substituted or unsubstitutedalkenyl preferably having 2 to 8 carbon atoms, substituted orunsubstituted sulfonyl preferably having 1 to 8 carbon atoms such asmesyl (CH₃ SO₂O—), substituted or unsubstituted alkyl esters such asthose represented by R¹²COO— where R¹² is preferably an alkyl grouppreferably having 1 to 10 carbon atoms, substituted or unsubstitutedalkynyl preferably having 2 to 8 carbons, substituted or unsubstitutedalkylthio preferably having 1 to 8 carbons, cyano, nitro, etc.; and p isan integer of from 0 (where the phenyl ring has a single hydroxysubstitutent) to 4, and preferably is 0, 1 or 2. Also, two R² groups onadjacent carbons may be taken together to form (with ring carbons towhich they are attached) one, two or more fused aromatic or alicyclicrings having from 4 to 8 ring members per ring. For example, two R²groups can be taken together to form (together with the phenol depictedin the formula above) a naphthyl or acenaphthyl ring. As with units 1),the polymer may comprise a mixture of different units 3) with differingR² groups or no R² groups (i.e. p=0) by using a variety of substitutedor unsubstituted vinylphenyl monomers during the polymer synthesis. Asshown in the formula above, the hydroxyl group of units 3) may be eitherat the ortho, meta or para positions throughout the copolymer. Para ormeta substitution is preferred.

Each R³, R⁴ and R⁵ substitutent independently may be hydrogen orsubstituted or unsubstituted alkyl, for example, having 1 to 8 carbonatoms, preferably 1 to 6 carbons, or more preferably 1 to 3 carbons.Most preferably R³, R⁴ and R⁵ are hydrogen.

The above-mentioned substituted groups (i.e. substituted groups R¹¹ andR¹ through R⁵) may be substituted at one or more available positions byone or more groups such as halogen (particularly F, Cl or Br); C₁₋₈alkyl; C₁₋₈ alkoxy; C₂₋₈ alkenyl; C₂₋₈ alkynyl; aryl such as phenyl; oralkanoyl such as a C₁₋₆ alkanoyl of acyl. Typically a substituted moietyis substituted at one, two or three available positions.

In the above formula, x, y and z are the mole fractions or percents ofunits 3), 2) and 1) respectively in the copolymer. These mole fractionsvary over wide values. Variable x may be from 10 to 90 percent, morepreferably 20 to 90 percent; y may be from 1 to 75 percent, morepreferably 2 to 60 percent; and z may be 1 to 75 percent, morepreferably 2 to 60 percent.

Preferred copolymers include those where the only polymer unitscorrespond to the general structures of units 1), 2) and 3) above andthe sum of the mole percents x, y and z equals one hundred. However,preferred polymers also may comprise additional units wherein the sum ofx, y and z may be less than one hundred, although preferably those units1), 2) and 3) still constitute a major portion of the copolymer, e.g.where the sum of x, y and z may be at least 50 percent (i.e. at least 50molar percent of the polymer consists of units 1), 2) and 3)), morepreferably the sum of x, y and z is at least 70 percent, and still morepreferably the sum of x, y and z is at least 80 or 90 percent. Polymersconforming to the above formula are disclosed in U.S. Pat. No.5,861,231.

Polymers of the present invention are included in the photoresists inamounts of 5% to 30% by weight of solids, preferably from 10% to 20% byweight of solids. The term “solids” means all of the non-volatilecomponents that remain in the photoresist when dried. Non-volatilecomponents may include polymer binders, PAGs, thickners, surfactants,neutralizing bases, dyes and other non-volatile additives.

The above described polymers can be readily formed. For example, forresins of the above formulas, vinyl phenols and a substituted orunsubstituted alkyl acrylate such as t-butylacrylate and the like may becondensed under free radical conditions as known in the art. Thesubstituted ester moiety, i.e., R¹¹—O—C(═O)—, moiety of the acrylateunits serves as the acid labile groups of the resin and will undergophotoacid induced cleavage upon exposure of a coating of a photoresistcontaining the resin to DUV irradiation. Preferably the copolymer willhave a molecular weight of from 2,000 to 50,000, more preferably 5,000to 30,000 with a molecular weight distribution of 3 or less, morepreferably a molecular weight distribution of 2 or less. Desirably, theterpolymer contains the hydroxystyrene in the range of 50 to 90 mol %depending on the desired dissolution rate/sensitivity. The terpolymerhas a high glass transition temperature of 130° C. to 170° C. Theterpolymer also has a high acid sensitivity. The acid labile estergroups of the terpolymer are surprisingly thermally stable in thepresence of the phenolic hydroxy groups up to a temperature of 180° C.This enables high temperature pre- and post exposure baking of a film ofthe composition which results in substantially improved lithographicperformance. Additional details relating to the formation of suchpolymers can be found in U.S. Pat. No. 5,492,793 and in the above citedpatent U.S. Pat. No. 5,861,231.

In addition to the resins described above, non-phenolic resins, e.g. acopolymer of an alkyl acrylate such as t-butylacrylate ort-butylmethacrylate and a vinyl alicyclic monomer such as a vinylnorbornyl or vinyl cyclohexanol compound may be prepared by such freeradical polymerization or other known procedures and used as a binder inthe photoresists described herein.

At least a portion of the available hydroxyl groups on any of the abovedescribed polymer binders are bonded to an acid labile blocking group.In accordance with the invention, suitable blocking groups are thosethat deblock at an activation energy of at least 20 Kcal/mole and which,upon photocleavage, provide a group that is at least as polar ashydroxyl.

Using vinylic polymers for purposes of illustration, the acid labileblocking groups are generally used in accordance with the followingscheme in which a preferred polymer binder is condensed with a compoundthat comprises an acid labile group R′ and a suitable leaving group (L).

In the scheme shown described above, unit (1) represents a phenolic unitand unit (2) represents a cyclic alcohol unit: A, B, a, b and x are asdefined above, R′ is an acid labile blocking group; P is a polar groupformed by acidic cleavage of the acid labile blocking group R′; and y isthe mole fraction of units substituted with an acid labile group. Themole fraction represented by y may differ between aromatic units andcyclic alcohol units. Upon exposure, the photogenerated acid cleaves theacid labile group which is converted from a dissolution inhibiting groupto a base soluble organic group thereby enabling image development ofthe composition.

Regardless of the resin used as the photoresist binder, it issubstituted with an acid labile group that yields a suitable leavinggroup at an activation energy of 20 Kcal/mol or greater. For example, toprovide acid labile acetic acid groups pendant to the resin binderbackbone, the preformed resin binder may be condensed with a compound ofthe formula L-CR⁸R⁹C(═O)—OR¹⁰, where L is a leaving group such asbromide or chloride as described above, R⁸ and R⁹ are each independentlyhydrogen, an electron withdrawing group such as halogen (particularly F,Cl or Br), or substituted or unsubstituted C₁₋₁₀ alkyl; and R¹⁰ issubstituted or unsubstituted C₁₋₁₀ alkyl, or substituted orunsubstituted aryl such as phenyl or aralkyl such as benzyl. Thecondensation provides the —CR⁸R⁹C(═O)—O—R¹⁰ groups pendant to the resinbinder backbone and grafted onto the resin's available hydroxyl groups.Photoacid degradation of these groups during exposure and/orpost-exposure heating provides the polar acetic acid ether moietypendant to the resin binder backbone. Other acid labile groups may alsobe employed, e.g. oxycarbonyl groups such as those of the formula—C(═O)OR⁶ where R⁶ is as defined above and preferably is t-butyl orbenzyl. See U.S. Pat. No. 5,258,257 to Sinta et al. for a discussion ofacid labile groups and preparation and use of resist resin binderscomprising acid labile groups.

The photoresist compositions of the invention also contain a photoacidgenerator capable of generating a strong acid upon exposure to deep UVradiation. The photoacid generator is one that liberates a sulfonic acidhaving a strong electron withdrawing group. The function of the electronwithdrawing group is to increase the strength of the photogeneratedacid. The sulfonic acid has a pK_(a) of 0 or less and preferably apK_(a) within a range of −5 to −15 or less. The photoacid generator issuitably employed in an amount sufficient to generate a latent image ina coating layer of the resist upon exposure to activating radiation.

In accordance with the invention, the photoacid generator is one capableof generating an acid of the formula:X_(a)RSO₃Hwhere X_(a)R is an organic radical substituted with strong electronwithdrawing groups X. R may be alkyl having from 1 to 18 carbon atoms,aryl such as phenyl, benzyl, or naphthyl. Preferably R has 2 to 15carbon atoms, more preferably from 5 to 10 carbon atoms. Strong electronwithdrawing groups that may be substituted onto R are exemplified byhalo, or nitro, cyano, preferably fluoro. The subscript “a” representsthe number of strong electron withdrawing groups substituted onto R andis a whole number equal to 1 to 18, preferably from 2 to 15, mostpreferably from 5 to 10. Substituted within the scope of the presentinvention means that a hydrogen on a carbon is replaced by a substituentgroup. Preferred strong acids conforming to the above formula areperfluorooctane sulfonic acid and 2-trifluoromethylbenzene sulfonicacid. Representative examples of compounds capable of generating acidsconforming to the above generalized formula are given below wherenomenclature and substitutent identification used in the text is derivedfrom an identified reference source and where, from time to time, the(X_(a)RSO₃)⁻ radical is substituted onto the exemplified material.

One class of suitable photoacid generators is disclosed in U.S. Pat. No.5,558,976. Representative examples of these photoacid generatorsinclude:

where R¹³ is a straight-chain, branched or cyclic alkyl group havingfrom 1 to 10 carbon atoms and Z₁ is a sulfonyl group or a carbonylgroup.

Another class of photoacid generators that may be used to practice theinvention has a formula:G-Q-SO₂—RX_(a)where R, X and subscript “a” are as defined above, Q is oxygen or achemical bond, and G is a substituted or unsubstituted alkyl phenyl, asubstituted phenyl, an imido, sulfone, sulfonium ion, or iodonium ion.

Substitutent groups include, but are not limited to, —OSO₂X_(a)R, whereX_(a) and R are defined as above, hydrogen, hydroxyl, acyl, aryl,branched or unbranched alkyl, branched or unbranched alkoxy, carboxy,halogen or nitro groups.

Examples of such photoacid generators include:

where R is as defined above; and

where R²² is hydrogen, hydroxyl or a group represented by the formulaX_(a)RSO₂O— where X_(a)R is as defined above, and R²³ is a straight orbranched alkyl group having from 1 to 5 carbon atoms or a grouprepresented by the formula:

where R²⁴ and R³⁰ are independently a hydrogen atom, a halogen atom, astraight chain or branched alkyl group having 1-5 carbon atoms, astraight chain or branched alkoxy group having 1-5 carbon atoms, or agroup of the formula:R²⁶SO₂O—where R²⁶ is a group represented by the formula:

where R¹⁴, R¹⁵ and R¹⁶ are independently a hydrogen atom or a halogenatom; and q is 0 or an integer of 1-3, or a group represented by theformula:

wherein R¹⁷ R¹⁸, R¹⁹, R²⁰ and R²¹ are independently a hydrogen atom or ahalogen atom, a straight-chain or branched alkyl group having 1-5 carbonatoms, a straight-chain or branched alkoxy group having 1-5 carbonatoms, a trifluoromethyl group, a hydroxyl group, trifluoromethoxygroup.

Sulfonium salts represent the most preferred embodiment of the inventionand are represented by the following formula:

where R³¹, R³² and R³³ each independently represents a substituted orunsubstituted alkyl group or aryl group. With regard to each of theabove formulae, preferred examples of the substituted or unsubstitutedalkyl group and aryl group include a C₆₋₁₄ aryl group, a C₁₋₅ alkylgroup, and substituted derivatives thereof. Preferred examples of thesubstitutent on the alkyl group include a C₁₋₈ alkoxy group, a C₁₋₈alkyl group, nitro group, carboxyl group, hydroxyl group, and a halogenatom. Preferred examples of the substitutent on the aryl group include aC₁₋₈ alkoxy group, carboxyl group, an alkoxycarbonyl group, a C₁₋₈haloalkyl group, a C₅₋₈ cycloalkyl group and a C₁₋₈ alkylthio group.

Another suitable sulfonium salt has a formula:

where R²⁵ is a straight chain or branched alkyl group having 1-4 carbonatoms, a phenyl group, a substituted phenyl group or an aralkyl group;R²⁸ is a hydrogen atom, a halogen atom or a straight-chain, branched orcyclic alkyl group having 1-6 carbon atoms; R²⁷, is a straight chain orbranched perfluoroalkyl group having 1-8 carbon atoms, preferably 2 to 8carbons, a straight chain, branched or cyclic alkyl group having 1-8carbon atoms, preferably 2 to 8 carbons, a 1-naphthyl group, a2-naphthyl group, a 10-camphor group, a phenyl group, a tolyl group, a2,5-dichlorophenyl group, a 1,3,4-trichlorophenyl group or atrifluoromethylphenyl group.

Nitrobenzyl based compounds are disclosed in EPO published applicationNo. EP 0 717 319 A1. Such compounds may be defined by the followinggeneral formula:

where each R₄₁, R₄₂ and R₄₃ are individually selected from the groupconsisting of hydrogen and lower alkyl group having from 1-4 carbonatoms; and R₄₄ and R₄₅ are individually selected from the groupconsisting of CF₃ and NO₂ with the proviso that R₄₄ and R₄₅ cannot bothbe CF₃; and RX_(a) is as defined above.

N-sulfonyloxyimide PAGs may also be used in the compositions of theinvention and are as disclosed in World application WO94/10608. Thesematerials conform to the formula:

where the carbon atoms form a two carbon structure having a single,double or aromatic bond, or, alternatively, wherein they form a threecarbon structure, that is, where the imide ring is a five member or sixmember ring; X′ and Y (1) form a cyclic or polycyclic ring which maycontain one or more hetero atoms, or (2) form a fused aromatic ring, or(3) may be independently hydrogen, alkyl or aryl, or (4) may be attachedto another sulfonyloxyimide containing residue, or (5) may be attachedto a polymer chain or backbone, or alternatively, form

where R₁ is selected from the group consisting of H, acetyl, acetamido,alkyl having 1 to 4 carbons where m=1 to 3, NO₂ where m=1 to 2, F wherem=1 to 5, Cl where m=1 to 2, CF₃ where m=1 to 2, and OCH₃ where m=1 to2, and where m may otherwise be from 1 to 5, and combinations thereof,and where X and Y (1) form a cyclic or polycyclic ring which may containone or more hetero atoms, (2) form a fused aromatic ring, (3) may beindependently H, alkyl or aryl, (4) may be attached to anothersulfonyloxyimide containing residue, or (5) may be attached to apolymeric chain or backbone.

Iodonium salt photoacid generators are disclosed in published Europeanapplication 0 708 368 A1 and represent another preferred acid generator.Such salts are represented by the following formula:

where Ar¹ and Ar² each independently represents a substituted orunsubstituted aryl group. A preferred example of the aryl group includesa C₆₋₁₄ monocyclic or a condensed ring aryl group. Preferred examples ofthe substitutent on the aryl group include an alkyl group, a haloalkylgroup, a cycloalkyl group, an aryl group, an alkoxy group, a nitrogroup, a carboxyl group, an alkoxycarbonyl group, a hydroxyl group,mercapto group, and a halogen atom. Two of R³¹, R³² and R³³ and Ar¹ andAr² may be connected to each other via a single bond or a substitutent.

Disulfone derivatives are also suitable for the formulations of thisinvention and are disclosed in published European application 0 708 368A1. Such materials may be represented by the following formulae:Ar³—SO₂—SO₂—RX_(a)wherein RX_(a) is as defined above and Ar³ represents a substituted orunsubstituted aryl group. A preferred example of the aryl group includesa C₆₋₁₄ monocyclic or condensed-ring aryl group. Preferred examples ofthe substitutent on the aryl group include an alkyl group, a haloalkylgroup, a cycloalkyl group, an aryl group, an alkoxy group, nitro group,carboxyl group, an alkoxycarbonyl group, hydroxyl group, mercapto group,and halogen.

Of the photoacid generators contemplated for use in the photoresists ofthe invention, most preferred are di-(4-t-butylphenyl)iodoniumperfluorooctane sulfonate and di-(4-t-butylphenyl) iodonium2-trifluoromethyl benzene sulfonate.

The photoresist compositions of the invention preferably contain astrong base having a pK_(a) of at least 9 and preferably a pK_(a) withinthe range of from 11 to 15. A preferred base for the photoresist of theinvention would conform to the formula N(R′)₄A where each R′ isindependently substituted or unsubstituted alkyl preferably having from1 to about 12 carbon atoms, more typically 1 to 8 carbon atoms, or asubstituted or unsubstituted aryl such as a C₆₋₁₀ aryl, e.g. phenyl,naphthyl and the like, A is a counter anion of a halide, a substitutedor unsubstituted hydroxyalkanoyl preferably having 1 to 18 carbon atoms(i.e. a group substituted by hydroxy and carbonyl such as lactate—CH₃CH(OH)C(═O)O—), substituted or unsubstituted sulfonate including aC₆₋₁₈ aryl or C₁₋₁₂ alkyl sulfonate. The term hydroxyalkanoyl as usedherein refers to an alkanoyl group having one or more hydroxy moieties(typically 1, 2, 3 or 4 hydroxy moieties) on one or more carbons of thealkanoyl group. Exemplary sulfonate A groups include mesylate, triflate,tosylate, etc. Substituted A groups may be suitably substituted by oneor more groups such as halo particularly fluoro, chloro and bromo,hydroxide, cyano, nitro, C₁₋₁₂ alkyl, C₂₋₁₂ alkyl, C₂₋₁₂ alkenyl, C₁₋₁₂alkoxy, C₁₋₁₂ alkanoyl including acyl, etc. Additional amines can befound in U.S. Pat. No. 5,498,506 and SPIE, 2438, 551, 1995 and SPIE2438, 563, 1995. Examples of suitable amines include ammonium sulfonatesalts such as piperidinium p-toluenesulfonate and dicylohexylammoniump-tolunesulfonate; alkyl amines such as tripropylamine and dodecylamine;aryl amines such as diphenylamine, triphenylamine, aminophenol, or2-(4-aminophenyl)-2-(4-hyroxyphenyl)propane.

The base can be added to the photoresist composition in a relativelysmall amount, for example, from 0.01 to 5 percent by weight of thepolymer and more preferably, from 0.05 to 1 percent by weight.

An optional component of the photoresist composition of the invention isa dye. Preferred dyes enhance resolution of the patterned resist image,typically by reducing reflections and the effects thereof (e.g.notching) caused by the exposure radiation. Preferred dyes includesubstituted and unsubstituted phenothiazine, phenoxazine, anthracene andanthrarobin compounds. Preferred substitutents of substitutedphenothiazine, phenoxazine, anthracene and anthrarobin include e.g.halogen, C₁₋₁₂ alkyl, C₁₋₁₂ alkoxy, C₂₋₁₂ alkenyl, C₁₋₁₂ alkanoyl suchas acetyl, aryl such as phenyl, etc. Copolymers of such compounds alsomay be used as a dye, e.g., an anthracene acrylate polymer or copolymer.A curcumin dye also may be used for some applications. In addition toreducing reflections in deep U.V. exposures, use of a dye may expand thespectral response of the compositions of invention.

Photoresists of the invention also may contain other optional materials.For example, other optional additives include anti-striation agents,plasticizers, speed enhancers, etc. Such optional additives typicallywill be present in minor concentration in a photoresist compositionexcept for fillers and dyes which may be present in relatively largeconcentrations such as, e.g., in amounts of from about 5 to 30 percentby weight of the total weight of a resist's dry components.

The compositions of the invention can be readily prepared by thoseskilled in the art. For example, a photoresist composition of theinvention can be prepared by dissolving the components of thephotoresist in a suitable solvent such as, for example, a glycol etherexemplified by 2-methoxyethyl ether (diglyme), ethylene glycolmonomethyl ether, propylene glycol monomethyl ether; a Cellosolve estersuch as Cellosolve acetate, propylene glycolmonomethyl ether, methylethyl ketone, ethyl lactate, etc. Typically, the solids content of thecomposition varies between 5 and 35 percent by weight of the totalweight of the photoresist composition. The resin binder and PAGcomponents preferably are present in amounts sufficient to provide afilm coating layer and formation of good quality latent and reliefimages. See the examples which follow for exemplary preferred amounts ofresist components.

The compositions of the invention are used in accordance with generallyknown procedures. The liquid coating compositions of the invention areapplied to a substrate such as a semiconductor by spinning, dipping,roller coating, slot coating or other conventional coating technique.When spin coating, the solids content of the coating solution may beadjusted to provide a desired film thickness based upon the specificspinning equipment utilized, the viscosity of the solution, the speed ofthe spinner and the amount of time allowed for spinning.

The resist compositions of the invention are applied to substratesconventionally used in processes involving coating with photoresists.For example, the composition may be applied over silicon or silicondioxide wafers for the production of microprocessors and otherintegrated circuit components. Aluminum-aluminum oxide, galliumarsenide, ceramic, quartz or copper substrates also may be employed.Substrates used for liquid crystal display and other flat panel displayapplications are also suitably employed, e.g. glass substrates, indiumtin oxide coated substrates and the like.

Following coating of the photoresist onto a surface, it is dried byheating to remove the solvent until preferably the photoresist coatingis tack free. Thereafter, it is imaged through a mask in conventionalmanner. The exposure is sufficient to effectively activate thephotoactive component of the photoresist system—i.e., generatesufficient acid to produce a patterned image in the resist coating layerfollowing post exposure bake, and more specifically, the exposure energytypically ranges from 1 to 300 mJ/cm², dependent upon the exposure tooland the components of the photoresist composition.

Coating layers of the resist composition of the invention are preferablyphotoactivated by an exposure wavelength in the deep U.V. range i.e.,350 nm or less, more typically in the range of 300 nm or less, typically150 to 300 or 350 nm. A particularly preferred exposure wavelength is248 nm.

Following exposure, the film layer of the composition is preferablybaked at temperatures ranging from 120° C. to 160° C. Thereafter, thefilm is developed. The exposed resist film is rendered positive workingby employing a polar developer, preferably an aqueous based developersuch as an inorganic alkali exemplified by sodium hydroxide, potassiumhydroxide, sodium carbonate, sodium bicarbonate, sodium silicate, sodiummetasilicate; quaternary ammonium hydroxide solutions such as atetra-alkyl ammonium hydroxide solution; various amine solutions such asethyl amine, n-propyl amine, diethyl amine, di-n-propyl amine, triethylamine, or methyldiethyl amine; alcohol amines such as diethanol amine ortriethanol amine; cyclic amines such as pyrrole, pyridine, etc. Ingeneral, development is in accordance with art recognized procedures.

Following development of the photoresist coating over the substrate, thedeveloped substrate may be selectively processed on those areas bared ofresist, for example by chemically etching or plating substrate areasbared of resist in accordance with procedures known in the art. For themanufacture of microelectronic substrates, e.g., the manufacture ofsilicon dioxide wafers, suitable etchants include a plasma gas etch(e.g. an oxygen plasma etch) and a hydrofluoric acid etching solution.The compositions of the invention are highly resistant to such etchantsthereby enabling manufacture of highly resolved features, includinglines with submicron widths. After such processing, resist may beremoved from the processed substrate using known stripping procedures.

The following examples are intended to illustrate the present invention,not to limit its scope.

SYNTHESIS EXAMPLES Example 1 Preparation of Di-(4-t-butylphenyl)iodonium2-trifluoromethylbenzenesulfonate Part A: Preparation of2-Trifluoromethybenzenesulfonic acid

A 1 L 3 neck flask was charged with 2-trifluoromethybenzenesulfonylchloride (134.55 g, 0.55 mol) and water (320 mL). The reaction flask wasfitted with a condenser, an overhead stirrer and a nitrogen bubbler andthe biphasic reaction mixture heated at reflux for 24 hours. During thistime, the sulfonyl chloride hydrolyzed to2-trifluoromethylbenzenesulfonic acid, giving a clear homogeneoussolution. The aqueous solution was concentrated under vacuum and thesolid residue further dried in vacuum at 40° C. for 24 hours to give2-Trifluoromethylbenzenesulfonic acid as an off white solid.

Part B: Preparation of Di-(4-t-butylphenyl)iodonium2-trifluoromethylbenzenesulfonate

A 1 L 3 neck round bottom flask equipped was charged t-butylbenzene(134.22 g, 1.00 mol) and acetic anhydride (204.18 g, 2.00 mol). Theflask was fitted with an efficient overhead paddle stirrer and thestirrer started while potassium iodate (107.00 g, 0.50 mol) was added togive a white suspension. The reaction vessel was then equipped with athermometer and a pressure equalizing dropping funnel (125 mL) fittedwith a N₂ bubbler.

The reaction mixture was cooled to 0-5° C. in a large ice-water bath andconcentrated sulfuric acid (107.89 g, 1.10 mol) added dropwise via theaddition funnel. The addition was carried out at such a rate as tomaintain the reaction temperature in the 20-30° C. range and requiredaround 2 hours. As the addition proceeded the starting white suspensionbecame orange-yellow in color and the viscosity of the reaction mixtureincreased giving a tan paste. Once the addition was over, the reactionmixture was stirred at water bath temperature (20° C.) for a further 22hours. The reaction mixture was cooled to 5-10° C. and water (350 mL)was added dropwise over @ 30 min, maintaining the temperature below 30°C. The first @ 50 mL was added at a particularly slow rate to controlthe initial exotherm, thereafter the rest of the water was essentiallyadded in one portion.

The resulting cloudy mixture was washed with hexane (3×75 mL) and theaqueous solution of diaryliodonium salt was returned to the reactionflask and cooled to 15-20° C. in an ice water bath.2-Trifluoromethylbenzenesulfonic acid (113.09 g, 0.50 mol) (prepared asin Part A above) was added in one portion with stirring. The resultingcloudy reaction mixture was neutralized with ammonium hydroxide (14.8N,311 mL, 4.60 mol). The amount of base used corresponds to thetheoretical amount required to neutralize all acidic species in the pot,assuming quantitative reaction. The addition of the base was carried outat such a rate as to keep the temperature below 30° C. and requiredabout 2 hours. As the pH of the reaction mixture approached 6-7, a browngummy solid starts to precipitate from solution. At this point, additionof ammonium hydroxide is temporarily stopped and dichloromethane (300mL) is added to give a biphasic mixture. After stirring for 3 hours, thedichloromethane layer was drained off and the aqueous layer extractedwith additional dichloromethane (2×100 mL).

The combined dichloromethane extracts was washed with dilute ammoniumhydroxide until the pH of the aqueous layer is in the 7-8 range [1×100mL, the pH of the aqueous solution was adjusted to 8-9 by addingsufficient ammonium hydroxide (14.8N) in small portions]. The organiclayer was washed with water (2×100 mL) until the pH of the aqueous phasewas around 6-7. The dichloromethane solution was concentrated on arotary evaporator under water aspirator vacuum. The resulting residue isthen purified by successive recrystallizations from ethylacetate-cyclohexane. The resulting white solid was dried at 70° C. invacuum for 36 hours, to give di-(4-t-butylphenyl)iodonium2-trifluoromethylbenzenesulfonate as a white powder.

Example 2 Preparation of Di-(4-t-butylphenyl)iodoniumperfluorooctanesulfonate

A 1 L 3 neck round bottom flask equipped was charged t-butylbenzene(134.22 g, 1.00 mol) and acetic anhydride (204.18 g, 2.00 mol). Theflask was fitted with an efficient overhead paddle stirrer and thestirrer started while potassium iodate (107.00 g, 0.50 mol) was added togive a white suspension. The reaction vessel was then equipped with athermometer and a pressure equalizing dropping funnel (125 mL) fittedwith a N₂ bubbler. The reaction mixture was cooled to 0-5° C. in a largeice-water bath and concentrated sulfuric acid (107.89 g, 1.10 mol) addeddropwise via the addition funnel.

The addition was carried out at such a rate as to maintain the reactiontemperature in the 20-30° C. range and required around 2 hours. As theaddition proceeded the starting white suspension became orange-yellow incolor and the viscosity of the reaction mixture increased giving a tanpaste. Once the addition was over, the reaction mixture was stirred atwater bath temperature (20° C.) for a further 22 hours. The reactionmixture was cooled to 5-10° C. and water (350 mL) was added dropwiseover @ 30 min, maintaining the temperature below 30° C. The first @ 300mL was added at a particularly slow rate to control the initialexotherm, thereafter the rest of the water was essentially added in oneportion.

The resulting cloudy mixture was washed with hexane (3×75 mL) and theaqueous solution of diaryliodonium salt was returned to the reactionflask and cooled to 15-20° C. in an ice water bath.Perfluorooctanesulfonic acid, potassium salt (269.11 g, 0.50 mol) wasadded in one portion with stirring. The resulting cloudy reactionmixture was neutralized with ammonium hydroxide (14.8N, 277 mL, 4.10mol). The amount of base used corresponds to the theoretical amountrequired to neutralize all acidic species in the pot, assumingquantitative reaction. The addition of the base was carried out at sucha rate as to keep the temperature below 30° C. and required about 2hours. As the pH of the reaction mixture approached 6-7, a brown gummysolid starts to precipitate from solution. At this point, addition ofammonium hydroxide is temporarily stopped and dichloromethane (300 mL)is added to give a biphasic mixture. After stirring for 3 hours, thedichloromethane layer was drained off and the aqueous layer extractedwith additional dichloromethane (2×100 mL).

The combined dichloromethane extracts was washed with dilute ammoniumhydroxide until the pH of the aqueous layer is in the 7-8 range (1×100mL, the pH of the aqueous solution was adjusted to 8-9 by addingsufficient ammonium hydroxide (14.8N) in small portions). The organiclayer was washed with water (2×100 mL) until the pH of the aqueous phasewas round 6-7. The dichloromethane solution was concentrated on a rotaryevaporator under water aspirator vacuum. The resulting residue is thenpurified by successive recrystallizations from ethylacetate-cyclohexane. The resulting white solid was dried at 70° C. invacuum for 36 hours, to give di-(4-t-butylphenyl)iodoniumperfluorooctanesulfonate as a white powder.

Example 3 Preparation of Triphenylsulfonium perfluorooctanesulfonate

To a suspension of perfluorooctanesulfonic acid potassium salt (10.76 g,20.0 mmol) in water (100 mL) at room temperature under nitrogen wasadded dropwise triphenylsulfonium bromide (6.87 g, 20.0 mmol) over 15min. After stirring the suspension for 30 min., dichloromethane (100 mL)was added and the biphasic mixture stirred at room temperature for 20hours. Additional dichloromethane (100 mL) was added and the layersseparated. The organic layer was washed with water (3×75 mL) until thewashings were neutral (pH 7). After drying (MgSO₄), removal of thesolvent in vacuum gave a viscous gum which was further dried by heatingat 50° C. for 24 hours under vacuum. In this way, triphenylsulfoniumperfluorooctanesulfonate was isolated as a pale yellow gummy solid.

Example 4 Preparation of Triarylsulfonium perfluorooctanesulfonate

To a suspension of perfluorooctanesulfonic acid potassium salt (24.81 g,46.1 mmol) in water (150 mL) at room temperature under nitrogen wasadded dropwise triarylsulfonium chloride (50% aqueous solution, 27.50 g)over 15 min. After stirring the suspension for 30 min., dichloromethane(75 mL) was added and the mixture stirred at room temperature for 20hours. Additional dichloromethane (225 mL) was added and the layersseparated. The organic layer was washed with water (3×125 mL) until thewashings were neutral (pH 7). After drying (MgSO₄), removal of thesolvent in vacuum gave a viscous gum which was further dried by heatingat 80-90° C. for 84 h under vacuum. In this way, triarylsulfoniumperfluorooctanesulfonate was isolated as a glassy solid.

Example 5 Preparation ofN-[(perfluorooctanesulfonyl)oxy]-norborane-2,3-dicarboximide

A 500 mL 3 neck flask was charged withN-hydroxy-5-norbornene-2,3-dicarboximide (22.39 g, 0.125 mol). The flaskwas fitted with a condenser, a dropping funnel, a nitrogen bubbler and amagnetic stirrer.

1,1,1,3,3,3-Hexamethyldisilazane (14.50 mL, 11.10 g, 68.75 mmol) wasadded via the dropping funnel followed by one drop ofchlorotrimethylsilane as catalyst. The suspension was brought to agentle reflux and heated there at for 3 hours. The resulting solutionsolidified upon cooling to room temperature. This solid was presumed tobe the corresponding N-OTMS ether. 1,2-Dimethoxyethane (75 mL) was addedfollowed by perfluorooctanesulfonyl fluoride (37.85 mL, 69.04 g, 0.1375mol) and the resulting biphasic mixture heated to reflux. A solution oftriethylamine (3.48 mL, 2.53 g, 25.0 mmol) in 1,2-dimethoxyethane (25mL) was added to the hot solution and the mixture turned pale orange.The reaction mixture was heated at reflux for 64 hours to give a darkbrown-black solution.

At this stage, TLC showed the presence of the desired product andconfirmed complete consumption of the starting alcohol. The reactionmixture was transferred to a 500 mL single neck flask and concentratedin vacuum to give a tan semi-solid which solidified on cooling to roomtemperature. The crude product (82.10 g) was suspended in hot methanol(200 mL) and heated to dissolve the solid. The resulting solution wascooled to room temperature and on standing for 6 hours, a significantamount of crystals were deposited.

The crystals were collected by suction filtration, rinsed with ice coldmethanol (2×25 mL) and dried in vacuum at room temperature for 18 hoursto give 28.03 g of material. The mother liquor was reduced to half itsoriginal volume and cooled in an ice bath to deposit additional solid.The second crystal crop was isolated as described above to give anadditional 6.81 g of material. The two crystal crops were combined andpurified by dry flash column chromatography using Flash grade silica gelusing 50% dichloromethane/50% hexane as eluant. The material was furtherpurified by recrystallization from hexanes. After drying at 50° C. for24 h, N-[(perfluorooctanesulfonyl)oxy]-5-norbornene-2,3-dicarboximidewas isolated as a white crystalline solid.

FORMULATION EXAMPLES Example 1

A control resist formulation comprising a terpolymer of4-hydroxystyrene, styrene and t-butylacrylate (72.35 g of a 20 wt. %solution in ethyl lactate), di-(4-t-butylphenyl)iodoniumcamphorsulfonate (DTBIOCS) 7.23 g of a 10 wt. % solution in ethyllactate), a basic additive (2.89 g of 20 wt. % solution in propyleneglycol monomethyl ether acetate), copolymer of 9-anthracene methacrylateand 2-hydroxyethyl methacrylate (0.23 g), Silwet™ L-7604 (1.60 g of a 5wt. % solution in ethyl lactate) and ethyl lactate (15.69 g) wasprepared.

Examples 2 to 5

Formulation examples 2 to 8 were prepared in a similar fashion to thatdescribed above incorporating the formulation indicated in Table II.

RESIST PROCESSING EXAMPLES

Table 1 details the process conditions for the experiment using theresist formulation of the Formulation 1 Example. The wafers wereprocessed on a GCA Microtrak coater and developer equipped for contactbakes. Exposures were performed on a GCAXLS7800 0.53NA, 0.74σ DUVStepper. TABLE I Process Information for Formulation DOE ProcessVariable Setting Thickness 6570 Å (E_(min)) Softbake 135° C., 60 sec.PEB 125-145° C. in 5° C. steps Developer MF-501 (0.24 N surf.) DevelopProcess 45 sec. Single stream puddle, 16 psi, Puddle Build 4 sec @ 500rpm + 2 sec @ 50 rpmResults

Table II summarizes the PEB sensitivity results over the 130-140° C. fordyed resist formulations. PEB sensitivity is defined as the differenceis line width between the smallest and widest lines across the resistsurface. TABLE II PEB Sensitivity Results over 130-140° C. PEB Range PEBSensitivity Example Formulation (nm/° C.) 1 Control (5% DTBPIOCS, 14.74% Polyethyoxylated ethylene diamine 2 5% DTBPIOCS 11.9 0.4% DTBPILactate 3 5% DTBPOTFMBS, 0.4% TBAH 4.0 4 5% DTBPIOPFOS, 0.4% TBAH 4.0 55% TPSCSA, 0.4% TBAH 9.3

The invention should not be construed as limited to the above recitedexamples.

1. A positive working photoresist composition comprising an alkalisoluble resin substituted with an acid labile blocking group thatrequires an activation energy of at least 20 Kcal/mol for deblocking,and a photoacid generating compound that undergoes photolysis whenexposed to a pattern of activating radition at a wavelength of 350 nm orless to yield a sulfonic acid having a strong electron withdrawing groupand a pK_(a) that does not exceed 0, the photoacid generator is onecapable of generating an acid of a formula:X_(a)RSO₃H where R is an alkyl having from 1 to 18 carbon atoms or aryl,X is a strong electron withdrawing group, and a is a whole number from 1to 18, the alkali soluble resin has a formula:

where x is from about 10 to 90 percent, y is from about 1 to 75 percent,and z is from 1 to 75 percent of the mole fraction, the hydroxyl groupon the hydroxystyrene may be present at either the ortho, meta, or parapositions throughout the copolymer, R¹¹ is substituted or unsubstitutedalkyl having 1 to 10 carbon atoms, R¹ and R² are independently halogen,substituted or unsubstituted alkyl having from 1 to 8 carbon atoms,substituted or unsubstituted alkoxy having from 1 to 8 carbon atoms,substituted or unsubstituted alkenyl having 2 to 8 carbon atoms,substituted or unsubstituted alkythio having from 1 to 8 carbon atoms,cyano, and nitro; and m is an integer of from 0 to 5 and p is an integerof from 0 to 4; and R³, R⁴, and R⁵ are hydrogen or substituted orunsubstituted alkyl.
 2. (canceled)
 3. The photoresist of claim 1 whereinthe pK_(a) of the liberated acid does not exceed
 0. 4. The photoresistof claim 1 wherein the pK_(a) varies between −5 and −15.
 5. Thephotoresist of claim 1 wherein the strong electron withdrawing group ishalo, nitro, or cyano.
 6. The photoresist of claim 5 wherein the strongelectron withdrawing group is fluoro.
 7. The photoresist of claim 1wherein the strong electron withdrawing group is perfluoroalkyl havingfrom 1 to 18 carbon atoms.
 8. The photoresist of claim 1 wherein theacid labile blocking group requires an activation energy of from 25 to40 Kcal/mol for deblocking.
 9. (canceled)
 10. The photoresist of claim 1further comprising a base having a pK_(a) of at least
 9. 11. Thephotoresist of claim 10 wherein the pK_(a) varies between 11 and
 15. 12.The photoresist of claim 10 wherein the base has a formula N(R′⁴)A whereR′ is substituted or unsubstituted alkyl preferably having from 1 toabout 12 carbon atoms or substituted or unsubstituted aryl, A is acounter anion of a member selected from the group consisting of halide,a substituted or unsubstituted hydroxyalkanoyl having from 1 to 18carbon atoms and substituted or unsubstituted sulfonate
 13. Thephotoresist of claim 12 wherein the counter anion is sulfonate.
 14. Thephotoresist of claim 12 wherein the counter anion is mesylate, triflateor tosylate. 15-20. (canceled)
 21. A positive working photoresistcomposition comprising an alkali soluble resin substituted with an acidlabile blocking group that requires an activation energy of at least 20Kcal/mol for deblocking, and a photoacid generating compound thatundergoes photolysis when exposed to a pattern of activating radiationat a wavelength of 350 nm or less to yield a sulfonic acid having astrong electron withdrawing group and a pK_(a) that does not exceed 0,the photoacid generator has a formula:

where X is a strong electron withdrawing group, R is an alkyl having 1to 18 carbon atoms or aryl, a is a whole number of 1 to 18, R³¹, R³² andR³³ are each independently a substituted or unsubstituted alkyl or arylgroup, and Ar¹, Ar², and Ar³ are each independently substituted orunsubstituted aryl groups; the alkali soluble resin has a formula:

where x is from about 10 to 90 percent, y is from about 1 to 75 percent,and z is from 1 to 75 percent of the mole fraction, the hydroxyl groupon the hydroxystyrene may be present at either the ortho, meta, or parapositions throughout the copolymer, R¹¹ is substituted or unsubstitutedalkyl having 1 to 10 carbon atoms, R¹ and R² are independently halogen,substituted or unsubstituted alkyl having from 1 to 8 carbon atoms,substituted or unsubstituted alkoxy having from 1 to 8 carbon atoms,substituted or unsubstituted alkenyl having 2 to 8 carbon atoms,substituted or unsubstituted alkythio having from 1 to 8 carbon atoms,cyano, and nitro; and m is an integer of 0 to 5 and p is an integer of 0to 4; and R³, R⁴, and R⁵ are hydrogen or substituted or unsubstitutedalkyl.
 22. A positive working photoresist composition comprising analkali soluble resin substituted with an acid labile blocking group thatrequires an activation energy of at least 20 Kcal/mol for deblocking,and a photoacid generating compound that undergoes photolysis whenexposed to a pattern of activating radiation at a wavelength of 350 nmor less to yield a sulfonic acid having a strong electron withdrawinggroup and a pK_(a) that does not exceed 0, the photoacid generator has aformula:

where R is an alkyl having from 1 to 18 carbon atoms or aryl, X is astrong electron withdrawing group and a is a whole number of 1 to 18,the carbon atoms may form a two carbon structure having a single, doubleor aromatic bond, or, alternatively, they may form three carbonstructure, where the imide ring is a five member or six member ring; X′and Y may form a cyclic or polycyclic ring with one or more heteroatoms, or may form a fused aromatic ring, or are independently hydrogen,alkyl or aryl, or are attached to another sulfonyloxyimide containingresidue, or are attached to a polymer chain or backbone, oralternatively, may form

where m is 5 and R₁ is independently selected from the group consistingof H, acetyl, acetamide, alkyl having from 1 to 4 carbon atoms, NO₂, F,Cl, CF₃, and OCH₃, with the proviso that when the alkyl having 1 to 4carbons is on the ring, there is only 1 such alkyl, when NO₂ is on thering, there may be 1 or 2 such groups, when F is on the ring, there maybe 1 to 5 such groups, when Cl is on the ring, there may be 1 to 2 suchgroups, when CF₃ is on the ring, there may be 1 or 2 such groups, andwhen OCH₃ is on the ring there may be 1 or 2 such groups; the alkalisoluble resin has a formula:

where x is from about 10 to 90 percent, y is from about 1 to 75 percent,and z is from 1 to 75 percent of the mole fraction, the hydroxyl groupon the hydroxystyrene may be present at either the ortho, meta, or parapositions throughout the copolymer, R¹¹ is substituted or unsubstitutedalkyl having 1 to 10 carbon atoms, R¹ and R² are independently halogen,substituted or unsubstituted alkyl having from 1 to 8 carbon atoms,substituted or unsubstituted alkoxy having from 1 to 8 carbon atoms,substituted or usnsubstituted alkenyl having 2 to 8 carbon atoms,substituted or usnsubstituted alkythio having from 1 to 8 carbon atoms,cyano, and nitro; and m is an integer of from 0 to 5 and p is an integerof from 0 to 4; and R³, R⁴, and R⁵ are hydrogen or substituted orunsubstituted alkyl.